Phase modulation using a titanium dioxide strip on lithium niobate
Date
2022-08-01
Journal Title
Journal ISSN
Volume Title
Publisher
Optical Materials Express
Abstract
In this manuscript, we demonstrate the first phase modulator using titanium dioxide as a strip loaded waveguide on thin-film lithium niobate. The amorphous titanium dioxide was fabricated using RF reactive sputtering followed by a dielectric lift-off process. Two gold electrodes were deposited next to the waveguide by using the same process. This process eliminates the need for plasma etching or high-temperature vapor deposition methods, opening the door to fabrication on sensitive material systems. A propagation loss of 0.156 dB/mm and Vš of 3.2 V at 1550 nm were experimentally measured and reported.
Description
Ā© 2022 Optica Publishing Group. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved. This article was originally published in Optical Materials Express. The version of record is available at: https://doi.org/10.1364/OME.465698
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Citation
Xiaofeng Zhu, Sean Nelan, Andrew J. Mercante, Benjamin Shopp, Peng Yao, Shouyuan Shi, and Dennis W. Prather, "Phase modulation using a titanium dioxide strip on lithium niobate," Opt. Mater. Express 12, 3296-3302 (2022)