Phase modulation using a titanium dioxide strip on lithium niobate
| Author(s) | Zhu, Xiaofeng | |
| Author(s) | Nelan, Sean | |
| Author(s) | Mercante, Andrew J. | |
| Author(s) | Shopp, Benjamin | |
| Author(s) | Yao, Peng | |
| Author(s) | Shi, Shouyuan | |
| Author(s) | Prather, Dennis W. | |
| Date Accessioned | 2022-08-31T14:28:11Z | |
| Date Available | 2022-08-31T14:28:11Z | |
| Publication Date | 2022-08-01 | |
| Description | Ā© 2022 Optica Publishing Group. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved. This article was originally published in Optical Materials Express. The version of record is available at: https://doi.org/10.1364/OME.465698 | en_US |
| Abstract | In this manuscript, we demonstrate the first phase modulator using titanium dioxide as a strip loaded waveguide on thin-film lithium niobate. The amorphous titanium dioxide was fabricated using RF reactive sputtering followed by a dielectric lift-off process. Two gold electrodes were deposited next to the waveguide by using the same process. This process eliminates the need for plasma etching or high-temperature vapor deposition methods, opening the door to fabrication on sensitive material systems. A propagation loss of 0.156 dB/mm and Vš of 3.2 V at 1550 nm were experimentally measured and reported. | en_US |
| Sponsor | The authors gratefully acknowledge the Office of Naval Research (ONR) for sponsoring this work, as well as all the help from Phase Sensitive Innovation, inc. and the University of Delaware nanofabrication Facility. | en_US |
| Citation | Xiaofeng Zhu, Sean Nelan, Andrew J. Mercante, Benjamin Shopp, Peng Yao, Shouyuan Shi, and Dennis W. Prather, "Phase modulation using a titanium dioxide strip on lithium niobate," Opt. Mater. Express 12, 3296-3302 (2022) | en_US |
| ISSN | 2159-3930 | |
| URL | https://udspace.udel.edu/handle/19716/31277 | |
| Language | en_US | en_US |
| Publisher | Optical Materials Express | en_US |
| Title | Phase modulation using a titanium dioxide strip on lithium niobate | en_US |
| Type | Article | en_US |
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