Grating Profile Reconstruction Based on Finite Elements and Optimization Techniques

Author(s)Hsiao, George C.
Author(s)Elschner, J.
Author(s)Rathsfeld, A.
Date Accessioned2005-01-05T15:30:50Z
Date Available2005-01-05T15:30:50Z
Publication Date2003-02-04
AbstractWe consider the inverse diffraction problem to recover a two-dimensional periodic structure from scattered waves measured above and beneath the structure. The task is reformulated in form of an optimization problem including special regularization terms. The solvability and the dependence on the parameter of regularization is analyzed. Numerical results for synthetic data demonstrate the practicability of the inversion algorithm.en
Extent1369111 bytes
MIME typeapplication/pdf
URLhttp://udspace.udel.edu/handle/19716/232
Languageen_US
PublisherDepartment of Mathematical Sciencesen
Part of SeriesTechnical Reports: 2003-01
Keywordsdiffraction gratingen
Keywordsprofile reconstructionen
Keywordsoptimization methoden
Keywordsconjugate gradient algorithmen
dc.subject.classificationAMS: 35R30, 35J05, 78A46, 78M50
TitleGrating Profile Reconstruction Based on Finite Elements and Optimization Techniquesen
TypeTechnical Reporten
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