Hsiao, George C.Elschner, J.Rathsfeld, A.2005-01-052005-01-052003-02-04http://udspace.udel.edu/handle/19716/232We consider the inverse diffraction problem to recover a two-dimensional periodic structure from scattered waves measured above and beneath the structure. The task is reformulated in form of an optimization problem including special regularization terms. The solvability and the dependence on the parameter of regularization is analyzed. Numerical results for synthetic data demonstrate the practicability of the inversion algorithm.1369111 bytesapplication/pdfen-USdiffraction gratingprofile reconstructionoptimization methodconjugate gradient algorithmAMS: 35R30, 35J05, 78A46, 78M50Technical Report