Grating Profile Reconstruction Based on Finite Elements and Optimization Techniques
Date
2003-02-04
Authors
Hsiao, George C.
Elschner, J.
Rathsfeld, A.
Journal Title
Journal ISSN
Volume Title
Publisher
Department of Mathematical Sciences
Abstract
We consider the inverse diffraction problem to recover a two-dimensional periodic
structure from scattered waves measured above and beneath the structure. The task
is reformulated in form of an optimization problem including special regularization
terms. The solvability and the dependence on the parameter of regularization is
analyzed. Numerical results for synthetic data demonstrate the practicability of the
inversion algorithm.
Description
Keywords
diffraction grating , profile reconstruction , optimization method , conjugate gradient algorithm