Browsing by Subject "vapor phase epitaxy"

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  • Khenner, M.; Braun, Richard J.; Mauk, M.G. (Department of Mathematical Sciences, 2001)
    The model for anisotropic crystal growth on a substrate covered by a mask material with a periodic series of parallel long trenches where the substrate is exposed to the vapor phase if developed. The model assumes that ...
  • Khenner, M.; Braun, Richard J.; Mauk, M.G. (Department of Mathematical Sciences, 2001)
    We developed a consistent mathematical model for isotropic crystal growth on a substrate covered by the mask material with periodic series of parallel long trenches where the substrate is exposed to the vapor phase. Surface ...

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